항 목 | 사 양 | |
---|---|---|
Tact Time | 112sec/13point | |
Measuring Method | 공초점 (Confocal) 방식 | |
측정 Repeatability | 20 nm (3σ,100X대물렌즈 기준) | |
Correlation(SEM 대비) | ||
Lens 성능 (100X 렌즈 기준) |
배율 | 최대 5,600 배 (24”모니터 기준, 5배 optical zoom시) |
Optical Zoom | 1X ~ 10X | |
F.O.V. | 125 μm X 125 μm | |
W.D. | 0.3 mm | |
Head Unit | Vertical Scan Speed | 150 Hz |
Vertical Scan Range | 100 μm | |
Vertical Resolution | 10 nm | |
Vertical Repeatability | 5 nm | |
F.O.V Lens | Confocal 대물렌즈 사용 | |
Scan Actuator | PZT (piezo electric actuator) | |
Feed Back | LVDT sensor로 feedback control | |
Illumination | Laser (wavelength 405 nm) | |
Controller | Maker : PI Piezo controller | |
X,Y,Z Stage |
Velocity | 10 mm/s |
Resolution | (X,Y) 0.1 μm / (Z) 0.5 μm | |
Repeatability | (X,Y) ±0.1 μm / (Z) ±0.3 μm | |
Driving Actuator | 5 phase stepping motor | |
Guide | LM guide | |
Controller | Suruga Seiki stepping motor 용 |
항 목 | 사 양 | |
---|---|---|
System | Work Table | Granite based table |
Air Suspension | Active Isolator with Passive Isolator | |
Wafer Handling | 방식 | Scara Robot with dual Arm |
Pre-Aligner | 2”, 4” and 6” wafer | |
OCR | 0.023mm/pixel, FOV 15x10.5mm | |
SECS/GEM | Include SECS -2 | |
Software | Recipe | Yes |
Auto 측정 | Yes | |
Result Data 저장 | Yes | |
Manual 측정 | Yes | |
Profile 분석 | Yes | |
Data Filtering | Yes | |
3D View | Yes | |
Zoom In/Out | Yes |